FYSS6335 Mikro- ja nanovalmistusmenetelmät (7 op)

Opinnon taso:
Syventävät opinnot
Arviointiasteikko:
0-5
Suorituskieli:
englanti
Vastuuorganisaatio:
Fysiikan laitos
Opetussuunnitelmakaudet:
2020-2021, 2021-2022, 2022-2023, 2023-2024

Kuvaus

  • Development of the silicon planar process and lithography

  • thin films: Materials, general properties and characterization

  • deposition methods (Physical & chemical vapor deposition)

  • etching methods (Dry, wet, plasma)

  • doping methods (Diffusion & Ion implantation)

  • nanoimprint lithography and self-assembly -based methods

  • state-of-the-art in microfabrication

  • the nanotechnology frontier 

Osaamistavoitteet

At the end of this course, students will be able to

  • create a micro- or nanofabrication process from scratch

  • describe the chemical and physical processes in different micro- and nanofabrication techniques

  • evaluate theoretically the outcome of different fabrication processes. 

Esitietojen kuvaus

FYSA1110 Experimental Methods in Physics or similar. 

Oppimateriaalit

Lecture notes, website, articles, etc.

Kirjallisuus

  • Sami Franssila, "Introduction to microfabrication", Wiley, 2004, ISBN: 978-0-470-85105-0
  • Brodie, Ivor, Muray, Julius J. "The Physics of Micro/Nano-Fabrication" Plenum 1993. ISBN: 978-0-306-44146-2
  • Marc J. Madou, "Fundamentals of Microfabrication: The Science of Miniaturization", CRC press, 2002. ISBN: 9780849308260

Suoritustavat

Tapa 1

Kuvaus:
Given every two years starting spring 2022.
Arviointiperusteet:
Active participation is expected. Half of total points required for passing. The grade is based on examination (70 %), assignments (15 %) and laboratory work (15 %).
Opetusajankohta:
Periodi 4
Valitaan kaikki merkityt osat
Suoritustapojen osat
x

Osallistuminen opetukseen (7 op)

Tyyppi:
Osallistuminen opetukseen
Arviointiasteikko:
0-5
Arviointiperusteet:
Active participation is expected. Half of total points required for passing. The grade is based on examination (70 %), assignments (15 %) and laboratory work (15 %).
Suorituskieli:
englanti
Työskentelytavat:

Lectures, assignments, laboratory work, examination. 

Opetus