FYSS6336 Mikrovalmistusmenetelmät (4 op)

• Development of the silicon planar process
• thin films: Materials, general properties and characterization
• deposition methods (Physical & chemical vapor deposition)
  
• optical lithography
  
• etching methods (Dry, wet, plasma)
  
• doping methods (Diffusion & Ion implantation)
  
• state-of-the-art in microfabrication

At the end of this course, students will be able to

• create a microfabrication process from scratch

• describe the chemical and physical processes in different microfabrication techniques

• evaluate theoretically the outcome of different fabrication processes. 

FYSA1110 Experimental Methods in Physics or similar. 

Lecture notes, website, articles, etc.