FYSS6335 Mikro- ja nanovalmistusmenetelmät (7 op)

• Development of the silicon planar process and lithography

• thin films: Materials, general properties and characterization

• deposition methods (Physical & chemical vapor deposition)

• etching methods (Dry, wet, plasma)

• doping methods (Diffusion & Ion implantation)

• nanoimprint lithography and self-assembly -based methods

• state-of-the-art in microfabrication

• the nanotechnology frontier 

At the end of this course, students will be able to

• create a micro- or nanofabrication process from scratch

• describe the chemical and physical processes in different micro- and nanofabrication techniques

• evaluate theoretically the outcome of different fabrication processes. 

FYSA1110 Experimental Methods in Physics or similar. 

Lecture notes, website, articles, etc.